3 years ago

Scanning distortion correction in STEM images

Various disturbances do exist in the image taking process of scanning transmission electron microscopes (STEM), which seriously reduces the resolution and accuracy of STEM images. In this paper, a deep understanding of the scanning distortion influence on the real and reciprocal spaces of STEM images is achieved via theoretical modeling and simulation. A scanning distortion correction algorithm is further developed based on two images scanned along perpendicular directions, which is able to effectively correct scanning distortion induced deviations and significantly increase the signal to noise ratio of STEM images.

Publisher URL: www.sciencedirect.com/science

DOI: S0304399116302030

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