Thin-film Potentiometric Sensor to Detect CO2 Concentrations Ranging Between 2 % and 100 %

5 years ago

Thin-film Potentiometric Sensor to Detect CO2 Concentrations Ranging Between 2 % and 100 %

Gemma G. Mandayo, Maria C. Morant-Miñana, Enrique Castaño, Irene Castro-Hurtado, Lander Rojo

A potentiometric thin-film sensor to detect CO2 in a wide range (2–100 %) has been developed. The system has been fabricated depositing a reference electrode of Pt, a solid electrolyte of YSZ (Yttria-stabilized Zirconia), a sensing phase made of Li2CO3 and a working electrode of Au via Physical Vapor Deposition (PVD). Characterization of the different elements has provided the optimal fabrication parameters and the system response for CO2 concentrations can be measured from 2 to 100 % at 450 °C. The sensor behaves as a non-Nerstian system and slightly deviates from a linear response with the logarithm of CO2 until the CO2 concentration reaches the 30 %. Higher CO2 amounts make the response divert more from the Nernst law but give a stable and reproducible response to CO2 in a wide range of concentrations. Based on these promising results the recovery time, stability, repeatability and selectivity of the sensor have been measured. The performance showed by the thin film sensor proves the feasibility of the use of this system for biogas and natural gas applications owing to its very good consistency at low temperature in a wide concentration range. Wide range CO2 sensor: Exploiting microelectronics and nanotechnology a potentiometric thin-film sensor of 300 nm is designed and fabricated for monitoring CO2 concentrations from 2 to 100 % at 450 °C (see picture). The sensor has a stable and reproducible response to CO2 in a wide range of concentrations. Moreover the recovery time, stability, repeatability and selectivity of the sensor proves the feasibility of the use of this system for biogas and natural gas applications.

Publisher URL: http://onlinelibrary.wiley.com/resolve/doi

DOI: 10.1002/elan.201700304