3 years ago

Balancing Block Copolymer Thickness over Template Density in Graphoepitaxy Approach

Balancing Block Copolymer Thickness over Template Density in Graphoepitaxy Approach
Sandra Bos, Patricia Pimenta Barros, Ian Cayrefourcq, Xavier Chevalier, Antoine Fouquet, Laurent Pain, Ahmed Gharbi, Florian Delachat, Jérôme Hazart, Raluca Tiron
Directed self-assembly (DSA) of block copolymers (BCP) is one of the most promising patterning solutions for sub-10 nm nodes. While significant achievements are demonstrated in pattern fidelity for various applications (contact shrink, line patterning), some challenges are still needed to be overcome especially regarding the defect density reduction, in order to ensure DSA insertion in high-volume manufacturing. In particular, in the case of the graphoepitaxy approach, a remaining challenge is to solve the pattern-densities-related defect issue due to BCP film thickness variation inside the guiding template. In order to address this issue, a new DSA process flow called “DSA planarization” is employed for contact-hole patterning, and consists in overfilling the guiding pattern cavities with a thick BCP film, followed by a plasma etch-back step. This new approach ensures a uniform control of the final thickness of the BCP inside guiding cavities of different densities, as demonstrated herein by AFM measurement. Thus, defect-free isolated and dense patterns for both contact shrink and multiplication are simultaneously resolved. Furthermore, the simulation results of BCP self-assembly overfilling the templates demonstrate that BCP domains are well-directed in vertical cylinders ordering inside guiding cavities, which confirms the experimental results and the viability of this approach. Uniform block copolymer (BCP) thickness over template density is achieved using a new and simple graphoepitaxy process flow called “directed self-assembly (DSA) planarization.” Simulations and SEM characterizations of BCP self-assembly overfilling the guiding patterns confirm the viability of this approach. Experimental results demonstrate the enhancement of DSA performances when using the DSA planarization flow.

Publisher URL: http://onlinelibrary.wiley.com/resolve/doi

DOI: 10.1002/mame.201700285

You might also like
Discover & Discuss Important Research

Keeping up-to-date with research can feel impossible, with papers being published faster than you'll ever be able to read them. That's where Researcher comes in: we're simplifying discovery and making important discussions happen. With over 19,000 sources, including peer-reviewed journals, preprints, blogs, universities, podcasts and Live events across 10 research areas, you'll never miss what's important to you. It's like social media, but better. Oh, and we should mention - it's free.

  • Download from Google Play
  • Download from App Store
  • Download from AppInChina

Researcher displays publicly available abstracts and doesn’t host any full article content. If the content is open access, we will direct clicks from the abstracts to the publisher website and display the PDF copy on our platform. Clicks to view the full text will be directed to the publisher website, where only users with subscriptions or access through their institution are able to view the full article.