3 years ago

Fabrication and optical characterization of suspended 2D membranes for electromechanics.

Robert G. Knobel, David B. Northeast

We report on a method for fabricating electromechanical structures using two-dimensional crystal materials and an all-resist process. Graphene and NbSe${}_2$ are used as the mechanical elements in parallel plate capacitor elements with several microns of suspended diameters. The optical cavity formed from the membrane/air/metal structures enables a quick method to measure the number of layers and the gap separation using comparisons between the expected colour and optical microscope images.

Publisher URL: http://arxiv.org/abs/1710.11320

DOI: arXiv:1710.11320v1

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