3 years ago

Fabrication of antenna-coupled KID array for Cosmic Microwave Background detection.

E. Shirokoff, Q. Y. Tang, P. S. Barry, J. Vieira, A. Kofman, R. Basu Thakur

Kinetic Inductance Detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the $O(500,000)$ detectors needed for the upcoming Cosmic Microwave Background - Stage 4 (CMB-S4) experiment. We have fabricated antenna-coupled MKID array in the 150GHz band optimized for CMB detection. Our design uses a twin slot antenna coupled to inverted microstrip made from a superconducting Nb/Al bilayer and SiN$_x$, which is then coupled to an Al KID grown on high resistivity Si. We present the fabrication process and measurements of SiN$_x$ microstrip resonators.

Publisher URL: http://arxiv.org/abs/1710.11255

DOI: arXiv:1710.11255v1

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