Control of the intrinsic microstructure in AP-PECVD synthesised amorphous silica thin films

5 years ago

Control of the intrinsic microstructure in AP-PECVD synthesised amorphous silica thin films

F.[space]M. Elam, B. C. A. M. van der Velden-Schuermans, M. C. M. van de Sanden, H. W. de Vries, S. A. Starostin

The lattice porosity of flexible silica encapsulation films can be regulated by varying the specific energy during the AP-PECVD process.

Publisher URL: http://feeds.rsc.org/~r/rss/ra/~3/A9I3Bb5sxS0/C7RA10975J

DOI: 2017/RA/C7RA10975J

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