3 years ago

Characterization of nano-crystalline Ti–W–N thin films for diffusion barrier application: a structural, microstructural, morphological and mechanical study

Reza Jalali, Mojtaba Parhizkar, Hassan Bidadi, Hamid Naghshara, Mohamad Javad Eshraghi


Ti–W–N thin films with various W contents are deposited on the glass and 304 steel substrates, kept at 150 °C, using the reactive magnetron co-sputtering system. The films were deposited with simultaneous sputtering of Ti and W targets where they powered by DC and RF sources, respectively. The effect of W content on the structure, microstructure and mechanical properties of Ti–W–N thin films are investigated by X-ray diffraction (XRD), field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy (EDX), atomic force microscopy (AFM) and nanoindentation tester. The results show that all films have NaCl-type structure with (200) or (111) preferred orientation, depending on the W content. Furthermore, cross-sectional images corroborate the formation of columnar structure and reduction in distance between the columns with increasing W content. The grains’ size calculated from XRD patterns and SEM micrographs revealed that increasing W content results in increasing their values in the films. Study of the surface morphology and the surface roughness of the films confirm the increase of surface roughness as a function of W content, and this is in agreement with the increase seen in the grain size. Incorporation of W to Ti–N system results in dramatic reduction in electrical resistivity. Addition of W to the films has significant effects on the film stoichiometry. With increasing RF power, the hardness of the films increases and reaches a maximum value of about 26.5 GPa at a RF power of 80 W while in higher values of power the hardness decreases.

Publisher URL: https://link.springer.com/article/10.1007/s00339-018-2171-7

DOI: 10.1007/s00339-018-2171-7

You might also like
Discover & Discuss Important Research

Keeping up-to-date with research can feel impossible, with papers being published faster than you'll ever be able to read them. That's where Researcher comes in: we're simplifying discovery and making important discussions happen. With over 19,000 sources, including peer-reviewed journals, preprints, blogs, universities, podcasts and Live events across 10 research areas, you'll never miss what's important to you. It's like social media, but better. Oh, and we should mention - it's free.

  • Download from Google Play
  • Download from App Store
  • Download from AppInChina

Researcher displays publicly available abstracts and doesn’t host any full article content. If the content is open access, we will direct clicks from the abstracts to the publisher website and display the PDF copy on our platform. Clicks to view the full text will be directed to the publisher website, where only users with subscriptions or access through their institution are able to view the full article.