4 years ago

Damage and recovery induced by a high energy e-beam in a silicon nanofilm

Damage and recovery induced by a high energy e-beam in a silicon nanofilm
Xianlin Qu, Qingsong Deng
Herein, electron beam-induced damage and recovery of a silicon thin film was investigated in situ via transmission electron microscopy (TEM).

Publisher URL: http://feeds.rsc.org/~r/rss/ra/~3/f9XPOscaRqY/C7RA04997H

DOI: 2017/RA/C7RA04997H

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