3 years ago

Commercialization of micro-fabrication of antenna-coupled Transition Edge Sensor bolometer detectors for studies of the Cosmic Microwave Background.

Natalie Roe, Adrian T. Lee, Akito Kusaka, Chris Bebek, Aritoki Suzuki, Nicholas Palaio, Stephen Holland, Leo Steinmetz, Maurice Garcia-Sciveres

We report on the development of commercially fabricated multi-chroic antenna coupled Transition Edge Sensor (TES) bolometer arrays for Cosmic Microwave Background (CMB) polarimetry experiments. CMB polarimetry experiments have deployed instruments in stages. Stage-II experiments deployed with O(1,000) detectors and reported successful detection of B-mode (divergent free) polarization pattern in the CMB. Stage-III experiments have recently started observing with O(10,000) detectors with wider frequency coverage. A concept for a Stage-IV experiment, CMB-S4, is emerging to make a definitive measurement of CMB polarization from the ground with O(400,000) detectors. The orders of magnitude increase in detector count for CMB-S4 requires a new approach in detector fabrication to increase fabrication throughput.and reduce cost. We report on collaborative efforts with two commercial micro-fabrication foundries to fabricate antenna coupled TES bolometer detectors. The detector design is based on the sinuous antenna coupled dichroic detector from the POLARBEAR-2 experiment. The TES bolometers showed the expected I-V response and the RF performance agrees with simulation. We will discuss the motivation, design consideration, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.

Publisher URL: http://arxiv.org/abs/1801.06991

DOI: arXiv:1801.06991v1

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