3 years ago

Accurate terahertz spectroscopy of supported thin films by precise substrate thickness correction

Dmitry Turchinovich, Mischa Bonn, Guy Schmerber, Zoltan Mics, Eric Beaurepaire, Jacek Arabski, Keno L. Krewer
We present a new approach for accurate terahertz time-domain spectroscopy of thin films deposited on dielectric substrates. Our approach relies on the simultaneous measurement of film and substrate, allowing for 15 nm—precise determination of the thickness variation between the sample and ...

Publisher URL: http://www.osapublishing.org/abstract.cfm

DOI: ol-43-3-447

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