Potentials of EUV light source based on microwave discharge in expanding jet of dense xenon plasma.
We discuss a concept of a point-like source of the extreme ultraviolet (EUV) light based on a non-equilibrium microwave discharge in expanding jet of dense xenon plasma with multiply charged ions. A conversion efficiency of microwave radiation to EUV light is calculated, and physical constrains, and opportunities for future devices are considered. Special attention is given to the trapping of spontaneous line emission inside a radiating plasma spot that significantly influences the efficiency of EUV light source.
Publisher URL: http://arxiv.org/abs/1712.10026
DOI: arXiv:1712.10026v2
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