Ultramicroscopy
Ultramicroscopy
5 years ago

Thermal Expansion Coefficient Measurement from Electron Diffraction of Amorphous Films in a TEM

We measured the linear thermal expansion coefficients of amorphous 5-30 nm thick SiN and 17 nm thick Formvar/Carbon (F/C) films using electron diffraction in a transmission electron microscope. Positive thermal expansion coefficient (TEC) was observed in SiN but negative coefficients in the F/C films. In case of amorphous carbon (aC) films, we could not measure TEC of because the diffraction radii required several hours to stabilize, at a fixed temperature.

Publisher URL: www.sciencedirect.com/science

DOI: S0304399117304515

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