ACS Nano
ACS Nano
5 years ago

And There Was Light: Prospects for the Creation of Micro- and Nanostructures through Maskless Photolithography

And There Was Light: Prospects for the Creation of Micro- and Nanostructures through Maskless Photolithography
J. Rühe
In photolithographic processes, the light inducing the photochemical reactions is confined to a small volume, which enables direct writing of micro- and nanoscale features onto solid surfaces without the need of a predefined photomask. The direct writing process can be used to generate topographic patterns through photopolymerization or photo-cross-linking or can be employed to use light to generate chemical patterns on the surface with high spatial control, which would make such processes attractive for bioapplications. The prospects of maskless photolithography technologies with a focus on two-photon lithography and scanning-probe-based photochemical processes based on scanning near-field optical microscopy or beam pen lithography are discussed.

Publisher URL: http://dx.doi.org/10.1021/acsnano.7b05593

DOI: 10.1021/acsnano.7b05593

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