5 years ago

Catalytic Chemical Vapor Deposition of Large-Area Uniform Two-Dimensional Molybdenum Disulfide using Sodium Chloride.

Oh, Lee, Woo, Ryu, Song, Kim, Park, Ko
The effective synthesis of atomically thin molybdenum disulfides (MoS<sub>2</sub>) of high quality and uniformity over a large area is essential for their use in electronic and optical devices. In this work, we synthesize MoS<sub>2</sub> that exhibit a high quality and large area uniformity using chemical vapor deposition (CVD) with volatile S organic compound and NaCl catalysts. In the latter process, the NaCl enhances the growth rate (5 min for synthesis of monolayer MoS<sub>2</sub>) and purity of the synthesized MoS<sub>2</sub>. The optical microscopy, Raman spectroscopy, X-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements indicate that the NaCl-CVD MoS<sub>2</sub> has a large grain size, clear Raman shift, strong photoluminescence, good stoichiometry, and 6-fold coordination symmetry. Moreover, we demonstrate that the electron mobility (10.4 cm<sup>2</sup>/V•s) and on/off current ratio (3 × 10<sup>7</sup>) of monolayer MoS<sub>2</sub> measured using a field-effect transistor are comparable to those of previously reported MoS2 synthesized using CVD.

Publisher URL: http://doi.org/10.1088/1361-6528/aa8f15

DOI: 10.1088/1361-6528/aa8f15

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